SUBSTRATE PROCESSING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a substrate processing apparatus that has a small-sized and simplified structure by improving a substrate supporting/fixing mechanism. SOLUTION: The substrate processing apparatus includes a substrate supporting pillar 42 that can hold the periphery of a substrate 2 by rotation; a pillar supporter 38 that can rotatably hold the substrate supporting pillar 42; straight advancing means 46, 51 and 53 that are provided in the pillar supporter 38; and coupling means 56 and 43 that couple the straight advancing means and the substrate supporting pillar, convert the straight advancing movement of the straight advancing means to rotary movement, and convey it to the substrate supporting pillar. COPYRIGHT: (C)2006,JPO&NCIPI