| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate processing apparatus and a substrate processing method capable of restricting the lowering of throughput by making a replacing operation of a substrate into a module even when the delivery of a substrate has been delayed. SOLUTION: In a substrate processing apparatus, when the substrates are allocated in a certain sequence from the previous module of the multi-modules by delivery means for each module of multi-modules composed of a plurality of modules which are transferred in identical order and carry out identical processing for substrates, and then when the delivery of an n-th substrate is delayed by m cycles in the previous module, the apparatus changes a transfer schedule so as to move each of n-th and subsequent substrates (including the n-th substrate) in the transfer schedule to a module to which an m-th substrate following the substrate has been allocated. COPYRIGHT: (C)2006,JPO&NCIPI
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