发明名称 |
Method and apparatus for selective, incremental, reconfigurable and reusable semiconductor manufacturing resolution-enhancements |
摘要 |
An automated design for manufacturability platform for integrated physical verification and manufacturing enhancement operations. Given original layouts and one or more associated resolution-enhanced layouts, intermediate resolution-enhancement state layouts are reconstructed, and selective localized resolution-enhancement reconfigurations, modifications, and/or perturbations are introduced on any existing enhancements in order to improve manufacturability and yield.
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申请公布号 |
US2005229130(A1) |
申请公布日期 |
2005.10.13 |
申请号 |
US20040820260 |
申请日期 |
2004.04.07 |
申请人 |
APRIO TECHNOLOGIES, INC. |
发明人 |
WU SHAO-PO;WANG XIN;TANG HONGBO;HUNG MEG |
分类号 |
G06F17/50;(IPC1-7):G06F17/50 |
主分类号 |
G06F17/50 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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