发明名称 Thermophoretic wand to protect front and back surfaces of an object
摘要 Methods and apparatus for enabling a clean, fragile object to be transported while protecting both front and back surfaces of the object are disclosed. According to one aspect of the present invention, a thermophoretic wand that is arranged to carry an object having a first temperature includes a first element, a contact surface, and an air supply. The first element has a first opening defined therein, and is maintained at a second temperature that is lower than the first temperature such that when the first element is in proximity to the object, a thermophoretic forces may be such that particles present between the object and the first element are driven away from the object. The air supply applies a vacuum of a first level through the first opening to suction the object against the contact surface.
申请公布号 US2005223718(A1) 申请公布日期 2005.10.13
申请号 US20040819509 申请日期 2004.04.07
申请人 NIKON CORPORATION 发明人 SOGARD MICHAEL
分类号 G03F1/16;B65G49/06;B65G49/07;F25D13/06;G03F1/14;G03F7/20;H01L21/00;H01L21/027;H01L21/677;H01L21/68;H01L21/683;(IPC1-7):F25D13/06 主分类号 G03F1/16
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