MAGNETIC FIELD SENSOR

摘要

A laminated coil (10) is composed of two coil forming elements (12, 14) formed of conductor layers, and a contact means (19), which is formed on an interlayer insulating film (13) provided between the conductor layers and brings the upper and the lower coil forming elements into contact by a via hole. One edge of the laminated coil is connected to an upper grounding layer (27) of a strip line (20), and the other edge of the laminated coil is connected to a strip conductor (23) of the strip line. The number of turns of the laminated coil is larger than 1. Since a magnetic flux penetrating the laminated coil becomes large and a relatively large electromotive force can be induced, a high spatial resolution can be easily obtained.