Surface acoustic wave device and method of fabricating the same

摘要

The device has a piezoelectric substrate with a surface provided with a film and pads (14) connected to comb-like electrodes (13). A base substrate has another surface with another pads joined to the previous pads and another film joined to the previous film. The two films joined by a surface activation process define a cavity in which the electrodes and the pads are hermetically sealed. An independent claim is also included for a method of fabricating a surface acoustic wave device.