发明名称 Spatial light modulator and method of performing photolithography using the same
摘要 An electronic circuit that can be used, for example, in a spatial light modulator (110) to photolithographically transfer an image onto a substrate (150), includes angled strobe lines (600) electrically coupled to respective sets of circuit elements (310) within an array (300) of circuit elements (310). Each set of circuit elements (310) includes at least two circuit elements (310) positioned diagonally adjacent one another in the array (300). The circuit elements (310) are alterable in response to data (222) stored therein. The strobe lines (600) provide strobe signals (402) to the circuit elements (310) to shift the data (222) between the circuit elements (310).
申请公布号 EP1585101(A2) 申请公布日期 2005.10.12
申请号 EP20040025094 申请日期 2004.10.21
申请人 AVAGO TECHNOLOGIES FIBER IP (SINGAPORE) PTE. LTD. 发明人 SCHROEDER, DALE W.
分类号 G02B26/08;G03F7/20;G09G3/34;G09G3/36;H01L21/027;(IPC1-7):G09G3/34 主分类号 G02B26/08
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