发明名称 LASER PROCESSING POWER OUTPUT STABILIZATION
摘要 <p>A Q-switched solid state laser system (24) operates in a pulse processing control system (10) that employs an autopulse mode and a pulse-on-position mode to stabilize the pulse-to-pulse laser energy delivered to a workpiece (20) that is moved by an X-Y positioner (18). In the autopulse mode, laser pulses are emitted at a near maximum PRF, but the pulses are blocked from reaching the workpiece by an external modulator (28, 32), such as an acousto-optic modulator ("AOM") or electro-optic modulator (also referred to as a Pockels cell). In the pulse-on-position mode, the laser emits a pulse in response to the positioner moving to a location on the workpiece that coincides with a commanded coordinate location. The processing control system delivers a stream of coordinate locations, some requiring processing, at a rate that moves the positioner and triggers the laser at about the near maximum PRF. The pulse processing control system sets the AOM to a transmissive state whenever a coordinate location requiring processing is commanded and otherwise sets the AOM to a blocking state. This pulse timing technique provides a nearly constant interpulse period for the laser, thereby improving its pulse-to-pulse energy stability at the near maximum PRF.</p>
申请公布号 EP1150797(B1) 申请公布日期 2005.10.12
申请号 EP20000919278 申请日期 2000.02.10
申请人 ELECTRO SCIENTIFIC INDUSTRIES, INC. 发明人 BAIRD, BRIAN, W.;JORDENS, WILLIAM, J.;SWARINGEN, STEPHEN, N.
分类号 G02F1/11;B23K26/00;B23K26/06;B23K26/08;G03F7/20;H01S3/00;H01S3/10;(IPC1-7):B23K26/06 主分类号 G02F1/11
代理机构 代理人
主权项
地址