发明名称 Matching circuit for megasonic transducer device
摘要 A method and apparatus for matching impedance magnitude and impedance phase for an acoustic- wave transducer load and an RF power source. The acoustic-wave transducer load has a load impedance magnitude and phase. The RF power source has a source impedance magnitude and phase. In one embodiment of the invention, a transformer matches the source and load impedance magnitudes. A capacitor, connected in series with the transformer, matches the source impedance phase to the load impedance phase.
申请公布号 US6954021(B2) 申请公布日期 2005.10.11
申请号 US20020194174 申请日期 2002.07.12
申请人 发明人
分类号 B06B1/02;H01L21/00;H03H7/40;(IPC1-7):H01L41/09 主分类号 B06B1/02
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