High Molecular Weight Silicone Compounds, Resist Compositions and Patterning Method,申请号KR19980031862-传众专利搜索

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发明名称	High Molecular Weight Silicone Compounds, Resist Compositions and Patterning Method
摘要
申请公布号	KR100452670(B1)	申请公布日期	2005.10.11
申请号	KR19980031862	申请日期	1998.08.05
申请人		发明人
分类号	G03F7/075;(IPC1-7):G03F7/075	主分类号	G03F7/075
代理机构		代理人
主权项
地址

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