发明名称 |
Cabinet for chemical delivery with solvent purging |
摘要 |
The present invention is an apparatus for storing and delivering a low vapor pressure process chemical to a process tool for semiconductor fabrication, comprising: a) a bulk container for storing the process chemical; b) a process container for delivering the process chemical to the process tool; c) a first manifold for delivering process chemical from the bulk container to the process container; d) a solvent container containing a quantity of solvent, and; e) a second manifold for delivering the process chemical from the process container to a process tool. A process for using the apparatus is also contemplated. |
申请公布号 |
US6953047(B2) |
申请公布日期 |
2005.10.11 |
申请号 |
US20020046614 |
申请日期 |
2002.01.14 |
申请人 |
AIR PRODUCTS AND CHEMICALS, INC. |
发明人 |
BIRTCHER CHARLES MICHAEL;MARTINEZ MARTIN CASTANEDA;STEIDL THOMAS ANDREW;VIVANCO GIL;SILVA DAVID JAMES |
分类号 |
H01L21/205;B67D7/02;F17C13/04;(IPC1-7):B08B5/00;B08B9/02;B08B9/032 |
主分类号 |
H01L21/205 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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