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发明名称
GAN SUBSTRATE FABRICATING APPARATUS HAVING VERTICAL REACTOR
摘要
申请公布号
KR20050098075(A)
申请公布日期
2005.10.11
申请号
KR20040023300
申请日期
2004.04.06
申请人
LG ELECTRONICS INC.
发明人
LEE, SUK WOO
分类号
H01L21/20;(IPC1-7):H01L21/20
主分类号
H01L21/20
代理机构
代理人
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地址
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