Apparatus and method for improving microwave coupling to a resonant cavity

摘要

An equipment status monitoring system ( 10 ) and method of operating includes first ( 40 ) and second ( 50 ) microwave mirrors in a plasma processing chamber ( 20 ) each forming a multi-modal resonator. A power source ( 60 ) is coupled to the first mirror ( 40 ) and configured to produce an excitation signal. A detector ( 70 ) is coupled to at least one of the first mirror ( 40 ) and the second mirror ( 50 ) and configured to measure an excitation signal. At least one of the power source ( 60 ) and the detector ( 70 ) is coupled to a divergent aperture ( 44 ).