ELECTRON BEAM DEVICE

摘要

PROBLEM TO BE SOLVED: To lessen the re-incidence of re-reflected electron on an object in an electron beam device. SOLUTION: The electron beam device having a radiation mechanism that generates the electron beam and radiates the same to the object and a re-reflection preventive mechanism that re-reflects the reflected electron reflected from the object in a direction different from the direction that the reflected electron beam comes in. COPYRIGHT: (C)2006,JPO&NCIPI