NANOWIRE AND ITS MANUFACTURING METHOD, SEMICONDUCTOR DEVICE

摘要

PROBLEM TO BE SOLVED: To provide orientation-controlled nanowires, because wires fabricated using prior art orientation-control is difficult and is difficult to be adapted as nanofine lines for electronic devices. SOLUTION: In this invention, a nano wire 1 is formed on a silicon crystal substrate 3 and composes silicides extending along a crystal orientation on the substrate from an insular nickel 2 arranged on the above substrate 3. COPYRIGHT: (C)2006,JPO&NCIPI