| 摘要 |
PROBLEM TO BE SOLVED: To prevent damage when removing a bolt for fixing a boat and the like. SOLUTION: A batch type vertical hot wall heat treatment apparatus is provided with a treatment room 24 holding a wafer 1 to the boat 33 so as to treat it; a sealing cap 16 supporting the boat 33, carrying it in and out with respect to the treatment room 24, and blocking a furnace port 27; and the bolt 76 fixing the boat 33 to a rotary shaft 17 inserted into the sealing cap 16. An enclosure 78 is arranged on the upper face of the lower end plate 35 of the boat 33 so that it covers the bolt 76 from above. Since the enclosure can prevent the bolt from being deposited, the bolt is prevented from becoming difficult to remove by deposition. Even if the enclosure becomes difficult to remove and it is damaged, exchange of a main component such as the boat, and the sealing cap is not necessary. Thus, trouble is not caused to maintain the heat treatment apparatus and the like. COPYRIGHT: (C)2006,JPO&NCIPI
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