| 摘要 |
PROBLEM TO BE SOLVED: To provide an objective lens improved for a charged particle beam device. SOLUTION: The objective lens includes a magnetic lens for generating a first magnetic field to focus a charged particle beam on a sample. In addition, a deflector is integrally formed with the magnetic lens by providing at least one additional coil device for generating a second magnetic field used to deflect the charged particle beam. Thus, the second magnetic field is guided through at least one of pole pieces of the magnetic lens. COPYRIGHT: (C)2006,JPO&NCIPI
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