| 摘要 |
PROBLEM TO BE SOLVED: To provide a leakage inspection system of a multi-channel work which enables high-precision inspection by thoroughly excluding a used trace gas. SOLUTION: The leakage detection system 10 comprises a chamber 11, connecting tubes 12a, 12b, 12c, an inspection device 24, and an air introduction tube 13b connected to an air introduction device 26. A work 30 having an outer chamber 31a and an inner chamber 31b is placed within the chamber 11. One end of the connecting tube 12a is connected to the outer chamber 31a, while one end of the connecting tube 12b is connected to the inner chamber 31b. Pressure reducing exhaust channels 15a, 15b and trace-gas inclusion channels 16a, 16b are connected to the other ends of the connecting tubes 12a, 12b, respectively. The other end of the connecting tube 12b is connected to the inspection device 24 through a gas leak detection channel 22a. The inspection device 24 is connected to the chamber 11. The air introduction tube 13b is connected to the inner chamber 31b. COPYRIGHT: (C)2006,JPO&NCIPI
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