| 摘要 |
PROBLEM TO BE SOLVED: To solve the problems with the conventional stamper composed of SiC or SiO<SB>2</SB>or the like that, although a column, cone and hemisphere have degrees of freedom as projection shapes, these shapes are manufactured by an exposure process using electron beams or a process of dry etching etc., and therefore the processes necessary for making the stamper are heretofore intricate. SOLUTION: The method for manufacturing the structure is provided with a process of forming a bore in a substrate by anodically oxidizing the substrate, a process of forming the structure on the substrate and in the bore, and a process of obtaining the structure having the projection reflecting the shape of the bore by removing the substrate, wherein the substrate contains additives to change the bore diameter therein and the amount of addition of the additives varies depending on the different regions of the substrate. COPYRIGHT: (C)2006,JPO&NCIPI
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