发明名称 Reactor having a movable shutter
摘要 A shutter assembly for a reactor includes a cylindrical shutter for selectively closing a passthrough opening of the reactor, the shutter forming a closed loop and including an internal cavity adapted to receive a cooling fluid, tubing connected with the cylindrical shutter for supplying the cooling fluid to the internal cavity, and an actuator connected with the tubing for moving the tubing and the cylindrical shutter. The cylindrical shutter is movable between a first substantially closed position and a second substantially open position.
申请公布号 US2005217578(A1) 申请公布日期 2005.10.06
申请号 US20050129548 申请日期 2005.05.13
申请人 GURARY ALEXANDER;ELMAN SCOTT;MOY KENG;BOGUSLAVSKIY VADIM 发明人 GURARY ALEXANDER;ELMAN SCOTT;MOY KENG;BOGUSLAVSKIY VADIM
分类号 C23C16/44;C30B25/08;C30B25/10;H01L21/00;H01L21/205;(IPC1-7):C23C16/00;C23F1/00 主分类号 C23C16/44
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