BOUNDARY ACOUSTIC WAVE DEVICE MANUFACTURING METHOD AND BOUNDARY ACOUSTIC WAVE DEVICE

摘要

A method of manufacturing a boundary acoustic wave device with less frequency variation. First to third media (1 to 3) are formed sequentially in this order. An electrode (5) is disposed at the boundary between the first and second media (1, 2). In the method, a multilayer body in which the first and second media (1, 2) are formed and the electrode (5) is disposed at the boundary between the first and second media (1, 2) is prepared, the thickness of the second medium (2) is adjusted at the stage of the multilayer body to regulate the frequency or sound velocity of a surface acoustic wave, pseudo-boundary acoustic wave, or a boundary acoustic wave, and after the regulation the third medium (3) having a sound velocity of the boundary acoustic wave and/or a material different from that of the second medium is formed.