| 发明名称 |
HIGH SENSITIVITY, LOW NOISE PIEZOELECTRIC FLEXURAL SENSING STRUCTURE |
| 摘要 |
A piezoelectric flexural sensing structure having increased sensitivity and decreased noise, without sacrifice of the sensor bandwidth. The structure is made up of a proof mass, a beam with a base and optionally having castellated bonding surfaces and two <011> poled bonding mode PMN-PT crystal plates mounted on the beam. |
| 申请公布号 |
WO2005059472(A3) |
申请公布日期 |
2005.10.06 |
| 申请号 |
WO2004US41845 |
申请日期 |
2004.12.15 |
| 申请人 |
WILCOXON RESEARCH, INC.;ZOU, LICHUN;DENG, KEN KAN |
发明人 |
ZOU, LICHUN;DENG, KEN KAN |
| 分类号 |
G01B5/28;G01C;G01L1/04;G01L1/16;H01L41/113 |
主分类号 |
G01B5/28 |
| 代理机构 |
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代理人 |
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