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发明名称
Vertikaler Feldeffekttransistor mit isolierter Steuerelektrode, Verfahren zu dessen Herstellung und entsprechende integrierte Schaltung
摘要
申请公布号
DE69826551(T2)
申请公布日期
2005.10.06
申请号
DE19986026551T
申请日期
1998.04.08
申请人
SHARP K.K., OSAKA
发明人
DEGAWA, TOSHIHIKO
分类号
H01L21/76;H01L21/336;H01L27/12;H01L29/78;H01L29/786;(IPC1-7):H01L29/78;H01L29/04;H01L27/088
主分类号
H01L21/76
代理机构
代理人
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地址
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