PIEZOELECTRIC THIN FILM, METHOD OF MANUFACTURING PIEZOELECTRIC THIN FILM, PIEZOELECTRIC ELEMENT, AND INKJET RECORDING HEAD

摘要

PROBLEM TO BE SOLVED: To provide a piezoelectric thin film having reduced non-uniform portions and holding satisfactory piezoelectric characteristics, a method of manufacturing the same, a piezoelectric element using the piezoelectric thin film, and an inkjet system recording head using the piezoelectric element.

SOLUTION: In the piezoelectric thin film of perovskite-type crystals formed on a substrate by a sol-gel process and represented by general formula Pb(1-x)Lax(ZryTi1-y)O3(where 0≤x<1, 0.05≤y≤1), a film thickness of the thin film is specified to ≥1,000 to ≤4,000 nm, and a difference between a maximum value and a minimum value of y in an arbitrary portion of the thin film is specified to ≤0.05.

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