发明名称 LIQUID CRYSTAL DISPLAY DEVICE AND ITS MANUFACTURING METHOD
摘要 <P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a liquid crystal display device capable of manufacturing the liquid crystal display device without causing flicker and sticking of liquid crystal inexpensively without increasing the number of processes. <P>SOLUTION: A reflecting pixel electrode 11 (3rd metal film) and a 2nd transparent conductive film 12 as a layer above it are patterned with the same mask pattern and subjected to a batch wet etching process using the same etchant. Consequently, the work function difference between a counter electrode substrate and a transparent common electrode is made small to manufacture the liquid crystal display device without causing the flicker and the sticking of liquid crystal inexpensively without increasing the number ofprocesses. Further, the 2nd transparent conductive film 12 is selectively etched, so a wet etching process using chemical liquid to selectively etch the 2nd transparent conductive film 12 is added to prevent the 2nd transparent conductive film 12 from peeling. Consequently, the liquid crystal display device can be obtained which does not cause a dot defect due to an electric short circuit between adjacent pixels and has high quality and a high yield, and is inexpensive. <P>COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2005275323(A) 申请公布日期 2005.10.06
申请号 JP20040092608 申请日期 2004.03.26
申请人 MITSUBISHI ELECTRIC CORP 发明人 NAKAHORI MASAKI;KIMURA HATSUMI;MIYAMOTO KENICHI
分类号 G02F1/1335;G02F1/1368;H01L21/3205;H01L21/336;H01L29/786 主分类号 G02F1/1335
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