| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate processing equipment, collecting data for analysis efficiently and capable of contributing to high precision data analysis. SOLUTION: The substrate processing equipment comprises a section for collecting data, concerning the operating state of the substrate processing equipment; a section for detecting the operating state of the substrate processing equipment; a section for storing the setting information concerning the data preset, in correspondence with a plurality of operating states in the substrate processing equipment, respectively; and a control section for collecting data at the data collecting section, based on the setting information corresponding to the operating state detected at the state detecting section. COPYRIGHT: (C)2006,JPO&NCIPI
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