| 摘要 |
PROBLEM TO BE SOLVED: To provide an electron microscope which realizes the automation with a tomography while using an omega type energy filter. SOLUTION: A second deflection coil 16 is arranged at a lower stage of an omega type energy filter 15. This deflection coil 16 generates a predetermined magnetic field in the X direction on the X-Y plane vertical to electron beams to calculate vectors which indicate the moving direction and moving amount for a target object on an image. Similarly, one set of deflection coils generate a predetermined magnetic field on the X-Y plane vertical to the electron beams to calculate vectors which indicate the moving direction and moving amount for the target object on the image. Then, a basic matrix is determined based on the vector calculated by the first vector calculation processing and the vector calculated by the second vector calculation processing. A correction value for correcting positional deviation is calculated based on this basic matrix. COPYRIGHT: (C)2006,JPO&NCIPI
|
