发明名称 METHOD AND DEVICE FOR SUPPORTING ERROR EVALUATION OF SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To evaluate the error of a semiconductor device using white neutrons independent on an accelerator. SOLUTION: A storage section 120 stores spectral data a plurality of white neutrons having different spectral shapes, and a plurality of SEE numbers obtained by a white method using each of the plurality of spectral data. A calculation section 100 executes the processing of reading the spectral data from the storage section 120 to divide the data into a plurality of energy groups, and calculating and storing the total flux of each energy group for each of the plurality of spectral data. The SEE number of each of the plurality of spectral data and the total flux of each energy group are read from the storage section 120, and these are substituted for a simultaneous equation where the product of a matrix element indicating the total flux of each energy group of each of the plurality of spectral data and a vector indicating the SEE sectional area of each energy group to calculate the SEE sectional area of each energy group. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2005276360(A) 申请公布日期 2005.10.06
申请号 JP20040090352 申请日期 2004.03.25
申请人 RENESAS TECHNOLOGY CORP 发明人 IBE HIDEFUMI;YAHAGI YASUO;KAMEYAMA HIDEAKI
分类号 G01R31/26;G01R31/30;G06F9/44;G06F11/22;G06F12/16;G06F17/18;G06F17/50;G11C11/412;G11C29/50;G11C29/56;(IPC1-7):G11C29/00 主分类号 G01R31/26
代理机构 代理人
主权项
地址