| 摘要 |
PROBLEM TO BE SOLVED: To provide a conveying device capable of certainly and easily positioning an end support roller for holding an end of a substrate according to variation in width dimension of the substrate, and an end pressing roller. SOLUTION: The conveying device comprises a plurality of conveyance spindles 3 of which both axial ends are supported rotatably and that are arranged at a predetermined interval, a plurality of conveyance rollers 21 disposed in the conveyance spindles, a pair of end support rollers 22 which are movably disposed in the axial direction at both axial ends of the conveyance spindles and support the lower surfaces at both widthwise ends of the substrate, pressing spindles 26 arranged above the conveyance spindles while the axes are in parallel, a pair of end pressing rollers 28 which are movably disposed in the axial direction at both axial ends of the pressing spindles and hold both widthwise ends of the substrate with the end support rollers, and a driving mechanism for integrally driving the end support rollers and the end pressing rollers in the axial direction of the conveyance spindles and pressing spindles according to the width dimension of the substrate. COPYRIGHT: (C)2006,JPO&NCIPI
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