MULTI-COMPONENT DEPOSITION METHOD AND APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a method for repairing worn or damaged gas turbine engine parts such as fan blades, the other blades, vanes or the like, and to provide an apparatus therefor. SOLUTION: An ion-enhanced physical vapor deposition is augmented by sputtering to deposit multi-component materials. The process may be used to deposit coatings and repair material on Ti alloy turbine engine parts. The physical vapor deposition may be ion-enhanced electron beam physical vapor deposition. The apparatus 100 for depositing the material on the workpiece comprises: a deposition chamber 102; a means 124 for forming plasma from one or more first sources 112 for material to be deposited, a means 128 for applying modulated bias potential on the workpiece 106 so as to attract ions from the plasma to the workpiece; and a means 232 for sputtering one or more sources 220 for material to be deposited. COPYRIGHT: (C)2006,JPO&NCIPI