LOW PRESSURE CONTROLLER AND CONTROL METHOD

摘要

PROBLEM TO BE SOLVED: To provide a low pressure controller and its control method which can output gas pressure with high precision. SOLUTION: Driving current is fed in a moving coil 29 and a flapper 28 is moved. An electropneumatic converter 1 which controls to reduce gas pressure of an output side path is used.And a pressure sensor 2 detects a pressure difference between the gas pressure which is reduced by the electropneumatic converter 1 and outer atmospheric pressure of a main low pressure controller, and feedback controlling is performed so that driving current of the moving coil 29 of the electropneumatic converter 1 sets the detected pressure difference as a desired value. COPYRIGHT: (C)2006,JPO&NCIPI