| 摘要 |
PROBLEM TO BE SOLVED: To provide a leak inspection device for a multipath workpiece for performing accurate leak inspection by reducing trace gas remaining in a pipe leading from a chamber under inspection to an inspection apparatus. SOLUTION: This leak inspection device 10 comprises a chamber 11, connecting pipes 12a, 12b, and 12c, the inspection apparatus 24, and a gate valve 23a provided on the other end of the connecting pipe 12b. The workpiece 30, equipped with an outside chamber 31a and an inside chamber 31b, is placed in the chamber 11. One end part of the connecting pipe 12a is connected to the outside chamber 31a while one end part of the connecting pipe 12b is connected to the inside chamber 31b. Depressurized exhaust paths 15a and 15b, and trace gas sealing paths 16a and 16b are connected to the other end side of the connecting pipes 12a and 12b. The other end part of the connecting pipe 12b is connected to the inspection apparatus 24 via a gas leak detection path 22a. Further, the inspection apparatus 24 is connected to the chamber 11. COPYRIGHT: (C)2006,JPO&NCIPI
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