发明名称 Superconductor fabrication processes
摘要 A method of forming a superconductive device is disclosed, which calls for cleaning a substrate having a dimension ratio of not less than about 10<SUP>2</SUP>, the cleaning including immersing the substrate in a fluid medium and subjecting the substrate to mechanical waves in the fluid medium, and depositing a superconductor layer to overlie the substrate.
申请公布号 US2005220986(A1) 申请公布日期 2005.10.06
申请号 US20040816045 申请日期 2004.04.01
申请人 SUPERPOWER, INC. 发明人 SELVAMANICKAM VENKAT;QIAO YUNFEI;LENSETH KENNETH P.
分类号 B05D5/12;B08B3/02;B08B3/10;B08B3/12;C23C14/14;C23C14/48;H01L39/24;(IPC1-7):B05D5/12 主分类号 B05D5/12
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