发明名称 SILICON OPTICAL DEVICE
摘要 An optical device can be fabricated by forming a silicon rib, such as a poly-silicon rib, on a SOI substrate so that a portion of the SOI substrate is exposed, and by forming silicon spacers, such as amorphous or poly-silicon spacers, that round off corners of the silicon rib.
申请公布号 WO2005071455(A3) 申请公布日期 2005.10.06
申请号 WO2005US01117 申请日期 2005.01.11
申请人 HONEYWELL INTERNATIONAL INC.;KEYSER, THOMAS, R. 发明人 KEYSER, THOMAS, R.
分类号 G02B6/12;G02B6/122;G02B6/132;G02B6/134;G02B6/136 主分类号 G02B6/12
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