| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a member for an apparatus for producing a semiconductor or a liquid crystal, by which falling of abrasive grains or fine chips of a ceramic onto a semiconductor wafer or a glass substrate of the liquid crystal, resulting in particles, is prevented in a process for producing the semiconductor or a liquid crystal device. <P>SOLUTION: The method for manufacturing the member for the apparatus for producing the semiconductor or the liquid crystal comprises subjecting a ceramic formed body to be fired to blast treatment using abrasive grains having the same material quality as that of the ceramic formed body or comprising an organic material, and then firing the ceramic formed body. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
