| 摘要 |
PROBLEM TO BE SOLVED: To provide a micro-projecting structure, mounted in an analyzer, a display device, a working device, a measuring device or an observing device, having high positional accuracy and angle (directional) accuracy, and formed of linear material having a large aspect ratio. SOLUTION: The linear material made of carbon nanotube is caused to grow from the bottom of a hole structure worked by a focusing ion beam to form the micro-projecting structure. Thus, the direction from the bottom of the hole structure to an opening part is substantially aligned with the direction of linear material projected from the hole structure. COPYRIGHT: (C)2006,JPO&NCIPI |
