发明名称 SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device capable of increasing an amount of charges accumulated in a capacitor. SOLUTION: To provide the semiconductor device which comprises a semiconductor substrate and the capacitor prepared on the semiconductor substrate which comprises a lower electrode 115, an dielectric film formed on the lower electrode and an upper electrode 117 which is formed on the dielectric film and has a plurality of hole pattern portions 201. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2005277350(A) 申请公布日期 2005.10.06
申请号 JP20040092434 申请日期 2004.03.26
申请人 TOSHIBA CORP 发明人 YAMAZAKI SOICHI;YAMAKAWA KOJI;NATORI KATSUAKI
分类号 H01L27/04;H01L21/02;H01L21/822;H01L21/8242;H01L21/8246;H01L27/02;H01L27/105;H01L27/115;H01L29/76;(IPC1-7):H01L27/105 主分类号 H01L27/04
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