发明名称 |
Electron beam apparatus and high-voltage discharge prevention method |
摘要 |
Disclosed is an electron beam apparatus and method which can retain the state that minimizes the amount of water content contained at a gap between a high-voltage cable and a high-voltage introduction insulator to thereby prevent creation of high-voltage discharge and current leakage. The apparatus comprises a means for applying a high voltage to an acceleration electrode while eliminating electron release from an electron source and for detecting a change in an emission current corresponding to a change in an acceleration voltage at this time. In addition, the apparatus comprises a means for issuing a cautionary notice or warning when the change of this emission current exceeds a prespecified value. Further, the apparatus comprises a means for letting a dry gas flow in a gap portion between the electron gun's high-voltage cable and the high-voltage introduction insulator to thereby dehumidify said gap portion. With such an arrangement, it is possible to prevent high-voltage discharge due to an increase in water content of the gap portion and also instability of an electron beam due to a leakage current.
|
申请公布号 |
US2005218777(A1) |
申请公布日期 |
2005.10.06 |
申请号 |
US20050137445 |
申请日期 |
2005.05.26 |
申请人 |
OKURA AKIMITSU;KIMURA MASASHI;HIRANE KENICHI;NAKAYAMA YOSHIHIKO |
发明人 |
OKURA AKIMITSU;KIMURA MASASHI;HIRANE KENICHI;NAKAYAMA YOSHIHIKO |
分类号 |
H01J37/06;G09G1/04;H01J37/065;H01J37/248;H01L21/027;H05B39/04;(IPC1-7):H05B39/04 |
主分类号 |
H01J37/06 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|