| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric actuator the reliability of which is improved by preventing a reaction from occurring between the material constituting a lead electrode and the material constituting a layer for formation of a lower electrode thereby improving the adhesion of a protective film. <P>SOLUTION: This piezoelectric actuator 500 is equipped with a diaphragm 50 which is made on a passage-forming board 10 having a pressure generating chamber 12 leading to a nozzle aperture 21, a piezoelectric element 300 which has a lower electrode 33 made on the region of the piezoelectric element active part, corresponding to the pressure generating chamber 12, of the diaphragm 50, a piezoelectric element layer 43 made on the lower electrode 33, and an upper electrode 44 made on the piezoelectric element layer 43, and a lead electrode 60 which is extended onto the piezoelectric element nonactive part of the diaphragm 50 from the upper electrode 44. For the diaphragm 50, the region to contact with the lead electrode 60 is recessed. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
