| 摘要 |
PROBLEM TO BE SOLVED: To provide a focal point detector for a microscope, which is excellent in noise resistance. SOLUTION: The device includes: a sensor part 16 which is disposed in a housing 20 of the microscope, detects faint light from an observation object 21, and outputs an analog signal corresponding to the relative position of the observation object and an observation optical system 23 of the microscope; a conversion part 17 which is disposed right behind the sensor part in the housing, converts the analog signal from the sensor part into a digital signal, and outputs the digital signal; computing parts 13 and 14 which are disposed outside the housing, take in the digital signal from the converting part, compute the digital signal, and thereby detect a focal point; and a signal transmission part 41 which is disposed on the path of the digital signal, electrically insulates the computing parts from the inside of the housing and transmits the digital signal photo-electrically. COPYRIGHT: (C)2006,JPO&NCIPI |
