NEAR-FIELD OPTICAL MICROSCOPE AND POLARIZATION EVALUATING METHOD USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a new near-field optical microscope capable of observing polarized light from an object to be observed, and to provide a polarization evaluating method using the same. SOLUTION: The near-field optical microscope 1 includes an incident optical system 10 for making polarized light from an illumination light source 11 incident on the object to be observed 2 via a polarization control part 12 and a polarization holding fiber 13; a scanning part stage 3 for mounting and scanning the object to be observed 2; a near-field light detecting optical system 20 for making near-field light from the object to be observed 2 incident on a polarization holding fiber probe 21 and acquiring a near-field light signal 23a by making a photodetector 23 detect the emerging light polarized and held by the polarization-retaining fiber probe 21 via a polarizer 22; and a control system 30 for controlling the scanning part stage 3 and inputting the near-field light signal 23a. A distribution of polarized near-field light from the object to be observed 2 is acquired, on the basis of position data of the scanning part stage 3 and the near-field light signal data 23a. COPYRIGHT: (C)2006,JPO&NCIPI