| 摘要 |
PROBLEM TO BE SOLVED: To provide a thermal analysis apparatus capable of accurately controlling humidity under conditions, such as constant water vapor pressure and constant relative partial pressure, and to provide a water vapor generating apparatus to be used in combination with the same. SOLUTION: The thermal analysis apparatus, capable of accurately controlling temperature and humidity, is provided with the water vapor generating apparatus 100 for supplying water vapor gas of a set temperature and humidity for the inside of a sample chamber; a water vapor sensor, comprising both a temperature sensor 132 and a humidity sensor 133 for detecting temperature and humidity in the sample chamber 210 or in a thermostatic chamber communicating with it; a sample temperature sensor 232 for detecting the temperature of a sample; a set humidity input means 140; and a control means 150 for controlling the humidity of the water vapor gas supplied for the inside of the sample chamber. An inputted humidity value is converted into a relative humidity value, corresponding to the temperature of the sample detected by the sample temperature sensor, and the relative humidity of the water vapor gas supplied for the inside of the sample chamber is controlled, on the basis of the converted relative humidity value and temperature and humidity of the water vapor gas detected by the water vapor sensor. COPYRIGHT: (C)2006,JPO&NCIPI
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