HYDROGEN ATOM DETECTING APPARATUS AND METHOD, MEMBRANE DEVICE MANUFACTURING EQUIPMENT AND METHOD, AND HYDROGEN ATOM MONITORING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a hydrogen atom detecting apparatus for detecting hydrogen atoms, to provide the hydrogen atom detecting apparatus and a method for easily and accurately monitoring the state of processes in membrane device manufacturing equipment which utilizes the atomic hydrogen, and to provide the membrane device manufacturing equipment and a method and a hydrogen atom monitoring method. SOLUTION: A vacuum chamber 2 is provided with an atomic hydrogen generating part having a tungsten wire 5 of a high-melting point metal. A hydrogen atom detecting element is arranged inside the vacuum chamber 2 for detecting hydrogen atoms. The element is made of a multi-component based glass containing at least one oxide selected from among TiO2, Nb2O5, and WO3. COPYRIGHT: (C)2006,JPO&NCIPI