| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe unit and a continuity test method capable of raising contact pressure with electrodes of a specimen and accurately positioning the electrodes of the specimen to contact parts of conductors to be brought in contact with the electrodes. SOLUTION: The probe unit includes a substrate having an opaque layer; opening parts formed in the opaque layer; the conductors formed on the substrate; the contact parts formed in the conductors and positioned on the substrate to be in contact with the electrodes of the specimen; traverse parts formed in the conductor and smaller than the opening parts to traverse the opening parts. By forming the contact parts to be in contact with the electrodes of the specimen on the substrate, it is possible to raise contact pressure with the electrodes of the specimen. By forming the opening parts in the opaque layer of the substrate and wiring in such a way that the conductors may traverse the opening parts, it is possible to simultaneously observe a traverse part of a conductor traversing an opening part and the specimen observed from the opening part with a microscope. It is therefore possible to accurately position the contact parts of the conductors and the electrodes of the specimen. COPYRIGHT: (C)2006,JPO&NCIPI
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