| 摘要 |
PROBLEM TO BE SOLVED: To provide a heat treatment device for quickly exhausting thermally decomposed gas while uniforming temperature distribution in a heating chamber. SOLUTION: The heat treatment device 1 for heating articles being carried via a container 4 comprises the heating chamber 2 demarcated as an approximately rectangular parallelepiped space, a heater 10 for heating the heating chamber 2, a conveyor 20 for carrying the container 4 in the heating chamber 2, and first and second fans 5, 6 for circulating gas in the heating chamber 2. The first and second fans 5, 6 are opposed to each other with the heating chamber 2 therebetween, and the first and second fans 5, 6 are arranged at diagonal positions in the heating chamber 2. A vortex gas flow is caused in the heating chamber 2 by blowing air with the first and second fans 5, 6. COPYRIGHT: (C)2006,JPO&NCIPI
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