| 摘要 |
PROBLEM TO BE SOLVED: To provide a device for adjusting a compact slit nozzle without causing washing nonuniformity of the slit nozzle and also being able to save a washing liquid, and a method for adjusting the slit nozzle using the device for adjusting. SOLUTION: The device for adjusting the tip end of the slit nozzle opened with the discharge port of a coating liquid having a predetermined width comprises an immersion type washing part for washing the slit nozzle, a drying part for drying the nozzle after washing and a pre-dispense part for preparing the discharge port of the slit nozzle, and is mounted on the same apparatus. The immersion type washing part also serves as a drying prevention part which holds the tip end of the slit nozzle in immersed state when the slit nozzle is not used for a prescribed time or longer. COPYRIGHT: (C)2006,JPO&NCIPI
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