| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for cleaning a slit nozzle capable of suppressing the consumption of a wiping member when the tip end of the slit nozzle is wiped. SOLUTION: An upper block 5 includes a slope face 8 roughly parallel with a slope face 101 of the slit nozzle 100, the opening 10 of a cleaning liquid supply part 9 for supplying a cleaning liquid to the slope face 101 is formed on the slope face 8, a part of a slope face in a directly upper position of the opening 10 is served as a regulation part 11 protruded at the slope face 101 side rather than the opening 10, and even if the slope face 101 comes into contact with the slope face 8 by the regulation part 11, the opening 10 is formed so as not to be covered. Further, the wiping member 13 is arranged between a pair of the upper blocks 5 and 5 through guide members 12 and 12. Furthermore, the wiping member 13 is composed of a relatively soft material such as sponge, rubber, resin or the like, and comes into contact with the slit nozzle 100 in a certain width in accordance with a shape of the lower end part of the slit nozzle 100 when the slit nozzle 100 falls. COPYRIGHT: (C)2006,JPO&NCIPI
|
