| 摘要 |
The present piezoelectric/electrostrictive film-type device comprises a ceramic substrate having a thin diaphragm portion and a peripheral thick portion, a lower electrode, an auxiliary electrode, a piezoelectric/electrostrictive film, and an upper electrode; the lower electrode, the auxiliary electrode, the piezoelectric/electrostrictive film, and the upper electrode having been layered in that order on the ceramic substrate. The upper electrode has a length of 30 to 70% in relative to the length of the thin diaphragm portion, and preferably has a width of 70% or more in relative to the width of the thin diaphragm portion. |
