| 发明名称 |
VACUUM CHUCK AND SUCTION BOARD |
| 摘要 |
<p>A vacuum chuck is provided for attaining uniform polishing of an object to be sucked. The vacuum chuck is provided by integrating a suction layer and a compact substance layer, which are formed of a porous ceramics, and positioning the suction layer on a side of sucking the object to be sucked. The vacuum chuck is provided with a suction board for sucking and holding the object to be sucked. The compact substance layer is formed by impregnating the porous ceramics with a metal.</p> |
| 申请公布号 |
WO2005092564(A1) |
申请公布日期 |
2005.10.06 |
| 申请号 |
WO2005JP05563 |
申请日期 |
2005.03.25 |
| 申请人 |
IBIDEN CO., LTD.;ISHIKAWA, SHIGEHARU;KIRIYAMA, KATSUYUKI |
发明人 |
ISHIKAWA, SHIGEHARU;KIRIYAMA, KATSUYUKI |
| 分类号 |
B23Q3/08;B24B37/30;H01L21/304;H01L21/683;(IPC1-7):B23Q3/08;B24B41/06;B24B37/04 |
主分类号 |
B23Q3/08 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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