| 摘要 |
PROBLEM TO BE SOLVED: To prevent imaging of a work by some imaging means from becoming a hindrance to imaging of the work by another imaging means, in a device for imaging the work by the plurality of imaging means. SOLUTION: This wiring pattern inspection device is equipped with a driving roller 50 for conveying carrier films 10 at a prescribed pitch when an operation command is issued, and conveying the prescribed number of substrates 12 to inspection tables 60, 62; a plurality of imaging cameras 114, 124 for imaging each substrate conveyed to the inspection table from one surface side or both surface sides of the carrier film respectively; an image processing/driving control part 115 for determining whether imaging of the surface of each corresponding substrate by each imaging camera is finished or not; and an integrated control part 202 for issuing an operation command to the driving roller when determined that imaging of the surface of each corresponding substrate by each imaging camera is finished, and determining existence of a defect of each wiring pattern based on imaged data by each imaging camera. COPYRIGHT: (C)2006,JPO&NCIPI
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